ZMI 4104C ZYGO Measurement Electronics Board | ZMI 4104
The ZMI 4104C Measurement Board is a high-performance measurement electronics board manufactured by Zygo, belonging to the ZMI™ series. It is designed for high – precision displacement measurements in various applications.
Product Overview
The ZMI 4104C is an advanced measurement board that plays a crucial role in optical metrology systems. Its core function is to accurately measure displacements with sub – nanometer resolution, making it ideal for applications requiring extremely high precision. It can handle up to four interferometers simultaneously, enabling multi – dimensional displacement measurements3. This board is based on a modular design, which allows it to be used in combination with other ZMI™ series boards to scale up to 64 axes of measurement, meeting the needs of complex measurement setups3. With its VME interface, it can be easily connected to a VME bus, a standard interface for high – performance data acquisition and control systems, facilitating efficient data transfer and system integration.
Technical Specifications
Parameter Name Parameter Value
Product Model ZMI 4104C
Manufacturer Zygo
Product Type Measurement Electronics Board
Resolution 0.1 nanometers
Axes of Measurement 4
Interface VME
Dimensions 263 × 58 × 28 mm
Weight 2.5 kg
Operating Temperature [Specify the range]
Power Supply [Specify the details]
Data Rate [Up to a certain value]
Error Reduction Cyclic error reduction
Main Features and Advantages
The ZMI 4104C offers several notable features and advantages. Firstly, its sub – nanometer resolution ensures extremely high – precision measurements, making it suitable for applications in nanotechnology, semiconductor manufacturing, and other fields where precise positioning is critical3. Secondly, the four – axis measurement capability allows for comprehensive multi – dimensional displacement measurements, providing more detailed information about the measured object3. The modular design is another highlight, enabling easy expansion and customization of the measurement system according to specific requirements3. In addition, the cyclic error reduction function helps to improve the accuracy and repeatability of measurements, ensuring reliable results. Moreover, the user – friendly software that comes with the board simplifies data acquisition, analysis, and visualization, enhancing the overall user experience3.
Application Areas
The ZMI 4104C is widely used in various fields. In the semiconductor manufacturing industry, it is used for monitoring and controlling the movement of precision stages in lithography equipment, ensuring the accuracy of wafer processing3. In the field of nanotechnology, it is employed for high – resolution surface topography measurements and precise alignment of nanoscale components3. It also plays an important role in optical systems, such as laser alignment and vibration isolation, helping to improve the performance and stability of these systems3. Additionally, it can be found in applications related to microscopy and nano – positioners, where precise control and measurement of stage movements are essential3.
Related Products
ZMI 4004: A measurement electronics board in the ZMI™ series, similar to the ZMI 4104C but may have different specifications or capabilities, perhaps with a lower axis count or different interface options.
ZMI 2002: Offers two axes of interferometry on a single 6U VME board, which can be used in simpler measurement setups or as a building block for larger systems in combination with the ZMI 4104C5.
Other ZMI™ series boards: Such as those with different axis counts or specialized functions, which can be combined with the ZMI 4104C to meet various measurement requirements.
Installation and Maintenance
Installation Preparation: Before installing the ZMI 4104C Measurement Board, ensure that the working environment meets the requirements, including proper temperature, humidity, and cleanliness. Check the power supply and VME bus connections to ensure they are in good condition. Carefully read the installation manual provided by Zygo and follow the step – by – step instructions for correct installation.
Maintenance Advice: Regularly check the board for any signs of damage or wear. Clean the board gently to remove dust and debris. Update the software and firmware in a timely manner to ensure the board operates at its best performance. If any problems occur, contact the professional technical support team of Xiamen XiongBa E – Commerce Co., Ltd. for assistance. Our company has a team of experienced technicians who can provide prompt and effective solutions to ensure the normal operation of the ZMI 4104C board.
Product Warranty
Xiamen XiongBa E – Commerce Co., Ltd. is a leading enterprise in the industrial control industry, established in 2007. We are an import – export trading distribution company, mainly selling industrial control spare parts of various brands. We have a large inventory of in – stock items, including many rare and discontinued models, and can meet customers’ urgent needs for spare parts. The product warranty period is one year. We provide high – quality after – sales service and technical support to ensure that customers have no worries when using our products. We are committed to providing customers with reliable products and excellent services, and have full confidence in the quality of the ZMI 4104C Measurement Board.
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